By combining a thermal MEMS sensor and a highly corrosion-resistant quartz glass flow path, the product can measure micro flow rates liquid flow of under 50 mL/min with a high degree of repeatability, which would be a difficult for traditional measurement methods. Product development was based on the concept of adopting a measurement method that is minimally susceptible to changes in the state of the fluid (e.g., bubbles, pulsation, fluid temperature changes), and making the product user-friendly, with easy-to-use correction functions for measured fluids (correction based on the thermal conductivity of the fluid). Measuring the instantaneous and integrating flow rates instead of previous methods (e.g., measuring the pump rotation speed, measuring the weight, or managing the fluid supply time) contributes reliable quality management and detection of anomalies in process based on measured values.